Karl suss ma6 mask aligner user manual

The purpose of this document is to detail the use of the Karl Suss MA56 Mask Aligner. All users are expected to have read and understood this document. It is not a substitute for in-person training on the system and is not sufficient to qualify a user on the system. Failure to follow guidelines in this document may result in loss of privileges. Usage Policies for Karl Suss MA6 Mask Aligner Standard policies for usage The Karl Suss Mask Aligner performs high resolution photolithography. It offers unsurpassed flexibility in the handling of irregularly shaped substrates of differing thickness, as well as standard size wafers up to 6’’ in diameter. The Karl Suss MA6 is a top and bottom side mask aligner used for fine lithography down to 1 micron or below. 2. W mercury arc lamp i-line (nm) with "smart power supply" is capable of operating in constant power mode, or constant intensity mode. The default is constant intensity mode. In this mode, the lamp deteriorates; the power is.

MA6/BA6 Standard Operating Procedure TES Rev. 06/17/ Karl Suss MA6/BA6 Mask Aligner Procedure General Overview: • The intensities calibrated are i‐line (nm) and h‐line ( nm). These were last calibrated at mW/cm2 for nm and mW/cm2 for nm. The Karl Suss MA-6 Contact Aligner system can perform precision mask- to-wafer (sample) contact printing in four modes; hard contact, soft contact, vacuum and proximity. Photolithography involves transferring a pattern from a mask to a wafer coated with photo resist. MA6 has the capability of processing both top and backside alignment. This tool is primarily used for high-resolution lithography (Karl Suss MA6 User.

This makes alignment using one objective easier. Applicable Documents a) Karl Suss MA6 Operating manual - hardcopy located at machine. The Karl Suss MA6 and MABA6 are contact aligners used for optical Front-side alignment is achieved using top-side microscope, mask and wafer placed on. The Karl Suss MA6 is a top and bottom side mask aligner used for fine After reading this manual, the user should be able to describe a typical ksaligner.